Vacuum Solutions

EUV, outgassing, pump time, stability & magnetic disturbances are the main parameters considered during a vacuum system's layout. This is in addition to all other key parameters that are relevant for a perfect motion solution for your demanding environment and performance.

Our systems are specifically developed to be able to run at partial pressures down to 10^9mbar by integrating specific components from linear motors (including specific shielding) to piezzo-driven units & special cables.

All relevant machined parts (aluminum and/or SUS) are produced internally in order to keep the level of cleanness and outgassing controlled perfectly.

All vacuum systems are assembled, tested, and packaged in our cleanroom, especially laid out to fill-full your production rhythm.

Typical specifications for "Vacuum" at POI*

• Configuration: XYZ or + Z (gantry)

• Travel: up to 400 x 500 mm

• Accuracy: ≤ 10 µm (over TIR, mapped)

• Repeatability: ≤ 0,1 µm

• Stability: ≤ 2 nm (within 1s ptp)

• Move & Settle: < 120 ms for 25 mm

• Cst velocity: < 0.01% at <100mm/s

• Straightness: < 5 µm over 300 mm

• Flatness: < 20 µm over 300 mm

HVH Industrial works with manufacturers' specialized engineering teams to meet our customers' requirements and highest quality standards. 

If you have any questions, write us via live chat (one of our team members will answer your questions), call, or send us a quote request. The HVH team is always ready to help you.

  1(866)577-4040

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